Model: SPI 11006

Planar Plasma Etcher

Properties:

General Description

For anisotropic etching of electron devices for failure analysis laboratories; built-in vacuum gauge, built-in pyrex chamber (replacable) w/lift-top design for easy loading and two gas valves making possible the mixing of 2 reactive gasses when desired

NSN

6630-01-291-7548

Part Number

SPI 11006

Description

Etcher,planar Plasma

CAGE

1P573

Material Classification

Hazardous material, precious metals, criticality, enviroment, and electrostatic discharge indicators

HMIC

PMIC

ESD/EMI

ENAC

MMAC

CRITL

HMIC:

PMIC:

ESD:

MMAC:

CRITL:

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Schedule B and Export

Schedule B: 9027803200
SITC: 87446
End Use: Laboratory testing instruments
NAICS: 334516
USDA: 1

Freight Class: Chemical analysis instruments and apparatus, nesoi